NUMERICAL MODELLING OF CVD PROCESSES AND EQUIPMENT
نویسندگان
چکیده
منابع مشابه
Numerical Modelling of Cvd Processes and Equipment
A review is given on actual numerical models for CVD equipment and processes. While the basic work concerning the differential equations and the boundary conditions has been established already a decade or more ago, the more recent availability of increased computing power has enabled simulation to become a predictive tool in equipment and process design. The present task in CVD simulation incl...
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1991
ISSN: 1155-4339
DOI: 10.1051/jp4:1991201